High Power Holographic Masks for Simplified Lithography Systems
October 12, 2007
In comparison to an amplitude mask and projection lens system, the high power holographic projection mask approach has significant advantages. By combining the functions of beam homogenizer, mask and projection lens into a single in-line optical element, this approach yields a highly efficient but greatly simplified lithography system for ablation patterning. A lower cost ablation process tool with greater throughput is one result. A holographic projection mask also exhibits image redundancy, reducing the need for beam homogenization and increasing its resistance to print defects produced by contamination or damage.
As the microelectronics industrys challenges for higher throughput become more evident, a laser ablation system that has nearly unlimited power handling, an order of magnitude greater light efficiency, more versatile imaging modes, a significantly lower price tag and a reduced cost of ownership model.
The work by Bill Parker at Creative MicroSystems involves a phase only transmission in-line optical hologram to shape beams and image patterns on a work piece. Bill's paper presented at the SPIE conference in San Diego on August 30th, examines the use of high power holographic projection masks to replace traditional reflective photomasks and the associated projection imaging optics currently used in laser ablation systems.
Contact Creative MicroSystems at Sales@CreativeMicro for a copy of the presentation at SPIE West.
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University of Vermont and Creative MicroSystems Collaborate on Cancer Research
July 16, 2007
Scientists from the University of Vermont are collaborating with Creative MicroSystems Corporation (CMC) in Waitsfield, VT on the development of a new kind of microscale silicone chip designed specifically for cancer research. The goal of the work is to develop miniature devices that can help cancer researchers analyze cellular movement and determine cellular level reaction to a variety of potential cancer treatments. The collaboration is being done in the Creative MicroSystems labs and cleanroom in Waitsfield and involves personnel from the UVM Department of Pharmacology, Vermont Cancer Center and CMC staff. Two local high school students were invited to participate in a week long Phase 1 research effort that took place last month.
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Vermont's Hotbeds of High-tech
May 17, 2004
Technology hubs, areas where companies of a like product or process congregate, are not new to Vermont. The earliest hubs formed around rivers and waterfalls where mills were built. Then mill towns grew up. Later, Vermont saw the emergence of the machine tool industry in Springfield and another technology center in St Johnsbury around Fairbanks Scales.
Today, Vermont has four distinct technology hubs, in Chittenden County, the Mad River Valley, the Upper Connecticut Valley and Windham County. By far the hub around Burlington is the largest.
"Almost all technology growth in the US is close to some university," explained David Japikse at Concepts NREC in Wilder. "In Vermont it's UVM. in New Hampshire, Dartmouth College."
Silicon Valley in California emerged from its proximity to Stanford University, and the 128 technology corridor around Boston emanated from the MIT/Harvard connection.
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